Widely tunable MEMS ring resonator with electrothermal actuation and piezoelectric sensing for filtering applications
نویسندگان
چکیده
منابع مشابه
Tunability of Piezoelectric MEMS Ring Resonator Based Filter
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ژورنال
عنوان ژورنال: Sensors and Actuators A: Physical
سال: 2015
ISSN: 0924-4247
DOI: 10.1016/j.sna.2015.02.023